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TiAlSi Cathodic Arc Target

We supply planar arc cathodes as well as planar sputtering targets for high quality TiAlSi targets

TiAlSi Cathodic Arc Target

Material: Titanium & Aluminum and Silicon Alloy

Symbol:Ti30Al60Si10at% ( or as requested )

Purity : 99.9%

Size : according to the drawing .

Application : Decorative Coating / Tooling Coating


Product Density requested(g/cm3Actual Density(g/cm3Relatively density%
Ti30Al60Si10at%>3.213.2199.85%


Main elements and impurities :(Ti30Al60Si10at%)

ItemTi(wt%)Al(wt%)Si(wt%)Fe(wt%)C(wt%)N(wt%)Mg(wt%)Cl(wt%)
Content44.6946.977.880.1060.0130.0120.0480.031


metallographic phase and SEM analysis:(Ti30Al60Si10at%)

TiAlSi Cathodic Arc Target

TiAlSi Cathodic Arc Target

Please send us your request with below details to " sales@mdlmaterials.com" 

1. Size /Tolerance ( with drawing )

2. Purity

3. Quantity

TiAlSi Cathodic Arc Target



Product Name: TiAlSi Cathodic Arc Target

Contact Us
  • Tell.: +86 510 8160 3363
  • Fax.: +86 510 8160 3363
  • Skype: adaxier
  • E-mail: sales@mdlmaterials.com
  • Add.: No.6 Xinyuan Road, Jiangyin City, Jiangsu Province, China, 214400.