During the coating process, some fragile targets will crack during coating process . We suggest to make them bonded into copper backing plates ,molybdenum backing plates or stainless steel backing plates .
Silicon target is easy to break when sputtering,we suggest to make it with bonding when using .
Advantage of bonding :
1.Good protection of the fragile targets when transportation .
2.Bonding can fix the problem of target sizes limitation .
3. Making the target has better cooling when sputtering ,which can avoid the uneven sputtering and target cracking when sputtering .
4. Making the targets has better thermal conductivity with bonding .
