ITO Indium Tin Oxide Sputtering Target

ITO Production process diagram

1. Main application:

ITO conducting glass

ITO thin film 

2.Product Characteristics 

2.1 .Chemical formula : In2O3/SnO2

2.2 .Appearance : Black lump ceramic target

2.3 .Purity: ≥99.99%

(Al,Fe,Cu,Ni,Pbamount ≤80ppm)

2.4 .Grain size : 5~15um

2.5. Relative density : ≥99.5%

2.6. Electrical resistivity: <1.2*10-4Ω▪cm

2.7. Thermal coefficient of expansion : 5.8*10-6 K-1

Shape :Disc,Rectangle

Currently our standard round target sizes range from 1" to 20" in diameter, and the rectangular targets are available in lengths up to and over 2000mm in single or multiple piece construction depending on the metal.

Please send us your request with below details to " sales@mdlmaterials.com" 

1. Size /Tolerance ( or drawing )

2. Purity

3. Quantity