Maideli will do the sputtering target packing into polybag with vacuum sealed .
But according to the target materials characteristics ,we will put some sputtering targets into the kerosene protection
Below nine types of sputtering targets need to be protected into kerosene (aerospace -grade kerosene):
Lithium (Li) target ,Calcium (Ca) target,Strontium (Sr) target，Barium (Ba) target ,Lanthanum (La) target,Cerium (Ce) target,Praseodymium (Pr) target ,Neodymium (Nd) target and Europium (Eu) target .
The suggestion for using the targets protected in kerosene （aerospace -grade kerosene ).
1. Prepare 500ml of acetone liquid ,open the package of the target , take the target out of the poly bag with tweezers ,and put the target into the acetone liquid for 10 seconds ,repeated the soaking operation for 3 times .
2. Then do the flash drying and put the target into the magnetron sputtering system .
3. Do the pre-sputtering to remove the oxide on the surface .we suggest the 20 mins of pre-sputtering time .
4. Maideli suggestion : do not take the target out of the sputtering chamber until the sputtering processing is finally done . Better to put the target into a vacuum protection in case of oxidation . （If can't be protected in vacuum protection ,put it back into kerosene .
